|Título/s:||Custom packaging design of microsystem and microelectronics devices|
|Autor/es:||Milano, O.; Roberti, M.; Fraigi, L.|
|Institución:||INTI-Electrónica e Informática. Buenos Aires, AR|
|Palabras clave:||Microsistemas; Microelectrónica; Envasamiento; Procesos de envasado; Envases; Películas gruesas; Bajas temperaturas; Dispositivos electrónicos; Materiales cerámicos|
| Ver+/- |
Custom Packaging Design of Microsystem and Microelectronics Devices
Milano, O.; Roberti, M.; Fraigi, L.
National Institute of Industrial Technology (INTI), Electronics and Informatics Centre
Buenos Aires, Argentina
The design, fabrication and characterization of packaging for integrated circuits and MEMS are presented. Thick Film and
Low Temperature Co-Fired Ceramics (LTCC) Technologies were used to obtain the different packages prototypes. The
performances of both technologies were compared.
Keywords: Microsystem, Microelectronics, Packaging, Thick Film, LTCC
As it is well known, the integrated circuits (ICs)
packaging allow, besides electrical connexions between
the IC and the external world, mechanical protection and
an adecuated power distribution and dissipation.
On the other hand, there are not standard solutions
for MEMS and the packages in this case should be done
depending on the specific application and environmental
In this paper we present some custom packaging
designs of ICs, fuel cell and RF devices, applying Thick
Film Technology (TFT) and Low Temperature Co-Fired
Ceramics (LTCC) . These technologies are suitable to
perform, besides standard packages for integrated
circuits, appropriate packages for microsystems.
All ICs package designs, were made with Autocad
2000, starting from chip (die) dimensions and distribution
of pads connections. Fig. 1 shows the top view of
connexions design for alumina substrate. In Fig. 2 the
package designs fabricated with LTCC technology are
presented. In the last case the X and Y shrinkage of
LTCC were considered. The three dimensional layout of
DIL 20 package designed for LTCC is showed in Fig. 3.
Fig. 1. Alumina package designs. a) Generic DIL 40. b) Lateral custom
SIL 20. c) Central custom SIL 20.
Fig. 2. LTCC package designs a) Custom DIL 20. b) Generic Quad 40
c) Generic DIL 16.
(a) (b) (c)
For the design of fuel cell package  we choose to design
a functional test bed that can handle fluids, electrical contacts
and exchange of parts such as: MEA (Membrane Electrode
Assembly) and GDL (Gas Diffusion Layer). To accomplish
the exchange of MEA and GDL, modular structures were
proposed, resulting in comparative tests of performance
among the various membranes. In Fig. 4 tree-dimensional
circulation of the fluid is showed.
Fig. 4. Circulation of fluid (green - fluid input / blue - fluid in contact to
GDL / red - fluid output)
For the first RF-Packages prototypes, CPW
(Coplanar Waveguide) lines were designed in order to
adjust the design parameters according to its
characteristic impedance Zo. Three prototype of CPW
lines were designed. Two models of CPW lines (different
W and S) and one more to characterize the bonding wire
(WB Model) .
Heraeus silver/palladium thick film C1218 was used
as conductor lines for alumina prototypes of ICs
packages. Standard thick film process was used.
For LTCC prototype of ICs packages, DuPont
Palladium/silver thick film paste 6146 (<60mOhms/sq)
was used as conductor lines. LTCC tapes were micro-
machined using a CNC (Computer Numerical Control)
milling machine . After lamination, the device was
sintered using typical LTCC temperature profile.
At die attach stage the chip was fixed with an
Heraeus adhesive paste PD922 applied onto the
TPT HB10 Wire Bonder Machine as mode ball was
used to bonding electrical connections. Fig.5 shows a
wire bonding details.
Fig. 5. Detail of IC wire bonding.
In Fig. 6. a photography of all models of thick film and
LTCC ICs packages is showed.
Fig. 6. Photography of alumina and LTCC packages.
To the package of fuel cell, DuPont 951 LTCC and
thick film paste 6146 was used. To achieve a modular
cell and easy replacement of MEA and GDL, an
elastomer was used as seal between the structure of
LTCC and membranes. In Fig. 7 a prototype of fuel cell
with an elastomer is showed.
Fig. 7. Prototype of fuel cell with an elastomer
After sintered, gold thin film was deposited with
sputtering method onto the surface of Pd/Ag, so that
only gold surface contact to MEA o GDL. Fig. 8 shows
the final prototype of fuel cell.
Fig. 8. Final prototype of fuel cell with sputtering Au deposit.
In the fabrication of CPW lines, standard LTCC
process was used. Model I with WI=380circleshadowdwnm and
SI=127circleshadowdwnm and Model II with WII=760circleshadowdwnm and
LII=254circleshadowdwnm. SMA end launch connectors were used to
characterize them. Heraeus F360 paste was used to
solder SMA end launch connectors. Fig. 9 shows
prototype of CPW lines with these connectors.
TPT HB10 Wire Bonder Machine as mode wedge
was used to WB-Model of CPW line .
Fig. 11 shows WB model of CPW line to analyze the
Fig. 10 shows the equivalent circuit diagram of ICs
Fig. 10. Equivalent circuit diagram of packages traces.
Marconi Instruments Ltd TF 1245A Q-meter was
used in measurement. Capacitance and Q factor at
30Mhz were measured. Eq. 1 shows how to calculate
the inductance of trace.
w 2 C
Eq. 1. Equation of trace inductance.
Lx = trace inductance w = resonance frequency
Laux = auxiliar inductor C = pattern capacitor
Keithley 4200-SCS characterization system and
model 590 CV were used to measure trace resistance
and capacitance. The values of measured capacitances
were in order of 10-15 farad.
In Table I, comparative values of electrical
characteristics of Central SIL 20 thick film and Custom
DIL 20 LTCC packages are showed.
Central SIL20 TFT Package Custom DIL20 LTCC Package
Pins R[crossceltic] L[nH] R[crossceltic] L[nH]
1,20 2,92 176 1,03 18,6
2,19 2,69 171 1,23 18,6
3,18 1,98 165 1,47 22,44
4,17 1,75 154 1,71 22,44
5,16 1,70 149 2,06 26,32
6,15 1,63 14,8 3,19 26,32
7,14 1,51 11 4,01 28,27
8,13 1,48 5,48 4,67 32,21
9,12 1,34 3,64 4,86 34,20
10,11 1,20 3,63 5,10 38,20
Table I. Comparative values of electrical characteristics.
In order to characterize the fuel cell prototype, the
properly fluidic circulation, the electrical contacts and the
seal were verified according to design specifications .
Vector Network Analyzer of 40Ghz was used to
characterize CPW lines and WB Model. Table II shows
S-Parameters obtained to different models.
Model I Model II WB Model
S11 -17 -20 -15
S12 -1,5 -0,95 -1,46
Table II. S-parameters of different CPW lines models.
In table II, we can see great values of S12 due to the
resistance of the line. This may be improved using
another thick film paste with less resistance by square.
− Thick Film Technology (TFT) and Low Temperature
Co-Fired Ceramics (LTCC) Technology is a very
suitable technology to fabricate standard packages
for ICs and custom packages for MEMS.
− Electrical characteristics of ICs packages fabricated
with both technologies, were compared.
− For the fuel cell prototype, two modules with LTCC
technology were manufactured, one for methanol +
products, another one for O2 + products. We are
using these modules in order to characterize
commercial MEAs and GDLs.
− Three models of CPW lines applied to RF-MEMS
packaging were fabricated and characterized.
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